Principles of Chemical Vapor Deposition
Editorial Reviews
Book Description
Principles of Chemical Vapor Deposition provides a simple introduction to heat and mass transfer, surface and gas phase chemistry, and plasma discharge characteristics. In addition, the book includes discussions of practical films and reactors to help in the development of better processes and equipment.
This book will assist workers new to chemical vapor deposition (CVD) to understand CVD reactors and processes and to comprehend and exploit the literature in the field. The book reviews several disparate fields with which many researchers may have only a passing acquaintance, such as heat and mass transfer, discharge physics, and surface chemistry, focusing on key issues relevant to CVD. The book also examines examples of realistic industrial reactors and processes with simplified analysis to demonstrate how to apply the principles to practical situations. The book does not attempt to exhaustively survey the literature or to intimidate the reader with irrelevant mathematical apparatus. This book is as simple as possible while still retaining the essential physics and chemistry. The book is generously illustrated to assist the reader in forming the mental images which are the basis of understanding.
Book Info
Text provides a comprehensible introduction to how chemical vapor deposition (CVD) processes and reactors work. For those new to CVD, and those who have practiced the art without an opportunity to understand how it works. Focus is on CVD as employed for microelectronic manufacturing. Assumes prior knowledge equivalent to a BS degree in the physical sciences.
Principles of Chemical Vapor Deposition,D.M. Dobkin,M.K. Zuraw,Springer,1402012489,Chemistry - General,Engineering - Industrial,Material Science,Physics,Refractory coating,Science,Science/Mathematics,Technical & Manufacturing Trades,Technology & Industrial Arts,Vapor-plating,Technology / Material Science
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