28 Vibration Suppression and Monitoring in Precision Motion Systems

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K.K. Tan, T.H. Lee,

K.Z. Tang, and S. Huang

National University of Singapore

S.Y. Lim, W. Lin,

and Y.P. Leow

Singapore Institute of Manufacturing

Technology

28.1 Introduction ........................................................................ 28-1

28.2 Mechanical Design to Minimize Vibration ...................... 28-2

Stability and Static Determinacy of Machine

Structures † Two-Dimensional Structures †

Three-Dimensional Structures

28.3 Adaptive Notch Filter ......................................................... 28-10

Fast Fourier Transform † Simulation and Experiments

28.4 Real-Time Vibration Analyzer ........................................... 28-17

Learning Mode † Monitoring Mode † Diagnostic

Mode † Experiments

28.5 Practical Insights and Case Study ...................................... 28-29

28.6 Conclusions ......................................................................... 28-35

Summary

Much research and development effort is going on to develop precision motion systems that are used in most

production equipment. Market demands for better products (products with much higher performance, higher

reliability, longer life, lower cost, and increasing miniaturization) are some of the main driving forces behind these

efforts. There are several challenges ahead in order to meet these stringent requirements for precision motion

systems. One of the main challenges is to suppress the mechanical vibrations in these motion systems. This chapter

provides several possible approaches to this objective. The first approach will focus on a proper mechanical design,

based on the determinacy of machine structure, to reduce the mechanical vibration in the motion systems to a

minimum. In addition to a good design, a monitoring and suppression mechanism is necessary to cope with

additional and usually unpredictable sources of vibration seeping in during the course of operations. An approach,

utilizing an adaptive notch filter in the control system, is presented in the chapter, to continuously identify resonant

frequencies present and suppress signal transmission into the system at these frequencies. Finally, the development

of a low-cost real-time vibration analyzer for precision motion systems is presented. A case study is provided at the

end of the chapter to illustrate the effectiveness of a remote vibration monitoring and control system for precision

motion systems.

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